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Ph.D. in Physics, University of Stuttgart and Max-Planck Institute of Solid State, Research, (1981)

M.S. in Physics, Purdue University, (1977)

B.S. in Physics, University of Heidelberg, (1974)

Articles

Linseis, V., Zeinab Mohamed, H., Reith, H., Garcia, J., Nielsch, K., Baumgart, H., Redel, E. and Woias, P. (2018). Complete thermoelectric characterization of PEDOT:PSS thin films with a novel ZT test chip platform. Physical Status Solidi. A, Applications and Materials Science 215 (7).

Shrestha, P. R.., Nminibapiel, D. M.., Campbell, J. P.., Ryan, J. T.., Veksler, D., Baumgart, H. and Cheung, K. P.. (2018). Analysis and Control of RRAM Overshoot Current. IEEE Transactions on Electron Devices 65 (1) , pp. 108-114.

Chen, X., Wang, Z., Hassan, Z. Mohamed., Lin, P., Zhang, K., Baumgart, H. and Redel, E. (2017). Seebeck Coefficient Measurements of Polycrystalline and Highly Ordered Metal-Organic Framework Thin Films. ECS Journal of Solid State Science and Technology 6 (4) , pp. P150--P153.

Bersuker, G., Veksler, D., Nminibapiel, D. M., Shrestha, P. R., Campbell, J. P., Ryan, J. T. and Baumgart, H. (2017). Toward reliable RRAM performance: Macro- and micro-analysis of operation processes. Journal of Computational Electronics 16 , pp. 1085-1094.

Ai, Y., Yalcin, S., Gu, D., Baysal, O., Baumgart, H., Qian, S. and Beskok, A. (2010). A Low Voltage Nano-Porous Electroosmotic Pump. J. Colloid and Interface Science 350 , pp. 465.

Tapily, K., Jakes, J., Shrestha, P., Gu, D., Baumgart, H. and Elmustafa, A. (2010). Nanomechanical Study of Amorphous and Polycrystalline ALD HfO2 Thin Films. Intl. Journal of Surface Science and Engineering.

Gu, D., Baumgart, H., Abdel-Fattah, T. and Namkoong, G. (2010). Synthesis of Nested Coaxial Multiple Walled Nanotubes by Atomic Layer Deposition. ACS Nano 4 , pp. 753-758.

Gu, D., Baumgart, H., Namkoong, G. and Abdel-Fattah, T. (2009). Atomic layer deposition of ZrO2 and HfO2 nanotubes by template replication. Electrochemical and Solid-State Letters 12 (4) , pp. K25-K28.

Jakes, J. E.., Frihart, C. R.., Beecher, J. F.., Moon, R. J.., Resto, P. J.., Melgarejo, Z. H.., Sua’rez, O. M.., Baumgart, H., Elmustafa, A. and Stone, D. S.. (2009). Nanoindentation near the edge. Journal of Materials Research 24 (3) , pp. 1016-1031.

Tapily, K., Shrestha, Gu, P. D.., Baumgart, H. and Elmustafa, A. (2009). Nanomechanical Response of the Si Lattice to Hydrogen Implantation and Annealing for Layer Splitting. Japanese Journal of Applied Physics 48 , pp. 101202-1-101202-4.

Zhu, X., Gu, D., Li, Q., Ioannou, D., Baumgart, H., Suehle, J. and Richter, C. (2009). Silicon Nanowire Non-Volatile Memory with High-k Gate Dielectric Stack. Microelectron. Eng. 86 , pp. 1957.

Gu, D., Baumgart, H., Zhu, M. and Celler, G. (2009). Size and Thickness Effect on the local Strain Relaxation in Patterned Silicon-on-Insulator. Electrochem. and Solid-State Lett. 12 (4).

Gu, D., Baumgart, H., Abdel-Fattah, T. and Namkoong, G. (2009). Synthesis of Tube-in-Tube Nanostructures of Metal Oxides by Template Replication. Nano Letters.

Gu, D., Tapily, K., Shrestha, P., Zhu, M., Celler, G. and Baumgart, H. (2008). Experimental Study of ALD HfO2 Deposited on Strained Silicon-on-Insulator and Standard SOI. J. Electrochem. Soc. 155 (6) , pp. G129 – G133 .

Tapily, K., Jakes, J. E.., Stone, D. S.., Shrestha, P., Gu, D., Baumgart, H. and Elmustafa, A. A.. (2008). Nanoindentation Investigation of HfO2 and Al2O3 Films Grown by Atomic Layer Deposition. J. Electrochem. Soc. 155 (7) , pp. H545 – H551 .

Gu, D., Tapily, K., Shrestha, P., Celler, G. and Baumgart, H. (2007). Experimental Study of Atomic Layer Deposition (ALD) HfO2 Deposited on Strained Silicon-on-Insulator (sSOI) & extra strained (xsSOI) and SOI. ECS Transactions 11 (4) , pp. 421-429.

Tapily, K., Jakes, J., Stone, D. S., Shrestha, P., Gu, D., Baumgart, H. and Elmustafa, A. (2007). Nanomechanical Properties of High-k Dielectrics Grown by Atomic Layer Deposition. ECS Transactions 11 (7) , pp. 123-130.

Miller, N., Tapily, K., Baumgart, H., Elmustafa, A. A.., Celler, G. and Brunier, F. (2007). Nanomechanical Properties of Strained Silicon-on-Insulator (sSOI) Films Epitaxially grown on Si1-xGex and Layer Transferred by Wafer Bonding. Mater. Res. Soc. Symp. Proc. 1021E (5).

Thitsa, M., Gu, D., Baumgart, H. and Albin, S. (2007). Tuning the absolute Bandgap of Silicon Photonic Crystals by Atomic Layer Deposition (ALD) Interfacial Layers. ECS Trans. 11 (7) , pp. 259-267.

Egloff, R., Letavic, T., Greenberg, B. and Baumgart, H. (1995). Evaluation of Strain Sources in Bond and Etchback Silicon-on-Insulator. Philips Journal of Research 49 (1/2) , pp. 125-138.

Baumgart, H., Letavic, T. and Egloff, R. (1995). Evaluation of Wafer Bonding and Etch Back for SOI Technology. Philips Journal of Research 49 (1/2) , pp. 91-124.

Maszara, W., Jiang, B., Yamada, A., Rozgonyi, G., Baumgart, H. and de Kock, A. R.. (1991). Role of Surface Morphology in Wafer Bonding. J. Appl. Phys. 69 (1) , pp. 257.

Baumgart, H. and van Ommen, A. (1989). Current Status of the Technology of Silicon Separated by Implantation of Oxygen ( SIMOX ). Materials Science and Engineering B2 (1-3) , pp. 111.

Krumme, J., Doorman, V., Hansen, P., Baumgart, H., Petruzzello, J. and Viegers, M. A.. (1989). Optical Recording Aspects of RF Sputtered Iron Garnet Films. J. Appl. Phys. 66(9) , pp. 4393.

Olego, D. and Baumgart, H. (1988). Raman Scattering Characterization of the Microscopic Structure of Semi-Insulating Polycrystalline Si ( SIPOS ) Films. J. Appl. Phys. 63 (8) , pp. 2669.

Olego, D., Baumgart, H. and Celler, G. (1988). Strains in Silicon-on-Insulator Structures Formed by Oxygen Implantation: Raman Scattering Characterization. Appl. Phys. Lett. 52 (6) , pp. 483.

Theunissen, M. J.., Baumgart, H., Haisma, J., Mulder, J. L.. and Rutten, W. M.. (1988). Substrate Damage Prevention and Simultaneous Zone-Melt Recrystallization in Stacked SOI Layers. J. Appl. Phys. 27 (10) , pp. L 1938.

Arnold, E., Baumgart, H., Khan, B. and Ramesh, S. (1987). Laser Beam-Induced Recrystallization of Silicon and its Application to Silicon-on-Insulator Technology. Philips Journal of Research 42 (3) , pp. 253.

Landmann, U., Luedtke, W., Barnett, R., Cleveland, C., Ribarsky, M., Arnold, E., Ramesh, S., Baumgart, H., Martinez, A. and Khan, B. (1986). Faceting at the Silicon (100 ) Crystal Melt Interface: Theory and Experiment. Phys. Review Letters 56 (2) , pp. 155.

Leamy, H., Chang, C., Baumgart, H., Lemons, R. and Cheng, J. (1982). Cellular Growth in Micro-Zone Melted Silicon. Materials Letters 1 , pp. 33.

Maier, M., Bimberg, D., Fernholz, G., Baumgart, H. and Phillipp, F. (1982). Electrical and Structural Properties of p-n Junctions in CW Laser Annealed Silicon. J. Appl. Phys. 53 (8) , pp. 5904.

Baumgart, H., Leamy, H., Celler, G. and Trimble, L. (1982). Grain Boundary Diffusion in Polycrystalline Silicon Films on SiO2. J. de Physique, Colloque C, Suppl. 10 43 (C-1) , pp. 363.

Chang, S., Queisser, H., Baumgart, H., Hagen , W. and Hartmann, W. (1982). High Resolution Real Time X-Ray Topography of Dislocation Generation in Silicon. Philosophical Magazine A 46 (6) , pp. 1009.

Merkle, K., Baumgart, H., Uebbing, R. and Phillipp, F. (1982). Picosecond Laser Pulse Irradiation of Crystalline Silicon. Appl. Phys. Lett. 40 (8) , pp. 729.

Celler, G., Trimble, L., Ng, K., Leamy, H. and Baumgart, H. (1982). Seeded Oscillatory Growth of Silicon over SiO2 by CW Laser Irradiation. Appl. Phys. Lett. 40 (12) , pp. 1043.

Maier, M., Bimberg, D., Baumgart, H. and Phillipp, F. (1982). SIMS Investigation of p-n Junction Quality in Ion Implanted CW Laser Annealed Silicon. Secondary Ion Mass Spectroscopy SIMS III, Springer Series in Chemical Physics 19 , pp. 336.

Baumgart, H., Phillipp, F., Rozgonyi, G. and Gosele, U. (1981). Slip Dislocation Formation During CW Laser Annealing of Silicon. Appl. Phys. Lett. 38 (2) , pp. 95.

Baumgart, H., Markewitz, G. and Hartmann, W. (1980). A Novel High Temperature Tensile Stage for Live X-ray Topography. J. Appl. Cryst. 13 , pp. 601.

Baumgart, H., Rozgonyi, G., Uebbing, R. and Phillipp, F. (1980). Laser Annealing of Silicon: Strain and Perfection of Epitaxially Reconstructed Surfaces. J. Phys. Soc. Japan 49 (A) , pp. 1291.

Uebbing, R., Wagner, P., Baumgart, H. and Queisser, H. (1980). Luminescence in Slipped and Dislocation-Free Laser Annealed Silicon. Appl. Phys. Letters 37 (12) , pp. 1078.

Rozgonyi, G. and Baumgart, H. (1980). Time Dependence of the Nucleation of Slip Dislocations During Laser Annealing of Silicon. Journal de Physique, Suppl. 5 41 (C4) , pp. 85.

Books

Baumgart, H. (2010). Semiconductor Wafer Bonding XI: Science, Technology and Applications. ECS Transactions, The Electrochemical Society.

Baumgart, H. (2008). Semiconductor Wafer Bonding 10: Science, Technology and Applications. ECS Transactions, The Electrochemical Society.

Baumgart, H. (2006). Semiconductor Wafer Bonding 9: Science, Technology and Applications. ECS Transactions,The Electrochemical Society.

Baumgart, H. (2005). Semiconductor Wafer Bonding VIII: Science, Technology and Applications. The Electrochemical Society.

Baumgart, H. (2003). Semiconductor Wafer Bonding VII: Science, Technology and Applications. The Electrochemical Society.

Baumgart, H. (2002). Semiconductor Wafer Bonding VI: Science, Technology and Applications. The Electrochemical Society.

Baumgart, H. (2001). Semiconductor Wafer Bonding V: Science, Technology and Applications. The Electrochemical Society.

Baumgart, H. (1998). Semiconductor Wafer Bonding IV: Science, Technology and Applications. The Electrochemical Society.

Baumgart, H. (1995). Semiconductor Wafer Bonding III: Physics and Applications. The Electrochemical Society.

Baumgart, H. (1993). Semiconductor Wafer Bonding II: Science, Technology and Applications. The Electrochemical Society.

Conference Proceeding

Tapily, K., Moutanabbir, O., Gu, D., Baumgart, H. and Elmustafa, A. (2010). Electrical Characterization of ALD ZnO and HfO2 Thin Films (pp. 281) ECS Transactions.

Gu, D., Yalcin, S., Baumgart, H., Zian, S., Baysal, O. and Beskok, A. (2010). Electrophoretic Light Scattering for Surface Zeta Potential Measurement of ALD Metal Oxide Films (pp. 37) ECS Transactions.

Gu, D., Baumgart, H., Nauman, F. and Petzold, M. (2010). Finite Element Modeling and Raman Study of Strain Distribution in Patterned Device Islands on Strained Silicon-on-Insulator (sSOI) Substrates (pp. 529) ECS Transactions.

Tapily, K., Gu, D. and Baumgart, H. (2010). Growth Mechanism of ALD ZnO Films Investigated by Physical Characterization (pp. 355) ECS Transactions.

Tapily, K., Moutanabbir, O., Abdullah, M., Gu, D., Baumgart, H. and Elmustafa, A. (2010). Hydrogen Ion-Induced AlN Thin Layer Transfer: An Elastomechanical Study (pp. 37) ECS Transactions.

Tapily, K., Moutanabbir, O., Gu, D., Baumgart, H. and Elmustafa, A. (2010). Investigation of Thermal Evolution of Implanted Hydrogen in GaN by Nanoindentation (pp. 241) ECS Transactions.

Tapily, K., Gu, D., Baumgart, H., Rigo, M. and Seo, J. (2010). Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition (pp. 117) ECS Transactions.

Valente-Feliciano, A., Phillips, H., Reece, C., Spradlin, J., Zhao, X., Gu, D., Baumgart, H., Beringer, D., Lukaszew, R., Xiao, B. and Seo, K. (2010). RF and Structural Characterization of SRF thin Films Kyoto: Proceedings of 1st International Particle Accelerator Conference IPAC-2010.

Gu, D., Tapily, K., Baumgart, H. and Elmustafa, A. (2010). Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures (pp. 203) ECS Transactions.

Gu, D., Shrestha, P., Baumgart, H. and Namkoong, G. (2009). ALD Synthesis of Tube-in-Tube Nanostructures of Transition Metal Oxides by Template Replication (pp. 191-198) ECS transactions.

Gu, D., Shrestha, P., Baumgart, H., Namkoong, G. and Abdel-Fattah, T. (2009). ALD Synthesis of Tube-in-Tube Nanostructures of Transition Metal Oxides by Template Replication (pp. 191-198) ECS Transactions.

Zhu, X., Gu, D., Li, Q., Baumgart, H., Ioannou, D., Suehle, J. and Richter, C. (2009). Application of ALD high-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories (pp. 473) ECS Transactions .

Yu, L., Rozgonyi, G., Shrestha, P., Gu, D. and Baumgart, H. (2009). C-V and Deep Level Transient Spectroscopy (DLTS) of ALD HfO2 on s-Si/SiGe/Si: Effects of strained-Si Thickness and Surface Nitridation (pp. 379) ECS Transactions.

Gu, D., Zhu, M., Nauman, F., Petzold, M. and Baumgart, H. (2009). Experimental Raman Study and Finite Element Modeling of Strain Distribution in University Park, PA: 51st Electronic Materials Conference.

Gu, D., Tapily, K., Yao, Y., Shrestha, P. and Baumgart, H. (2009). Low Temperature ZnO Growth for Nanotube Fabrication by Atomic Layer Deposition University Park, PA: 51st Electronic Materials Conference.

Abdel-Fattah, T., Gu, D., Baumgart, H., Bajpai, R. and Zaghloul, M. (2009). Modeling and Characterization of ALD grown ZnO Nanotubes and their Integration into Sub-Micron Devices (pp. 93) ECS Transactions.

Zhua, X., Gu, D., Lia, Q., Laonnou, D. E.., Baumgart, H., Suehle, J. S.. and Richter, C. A.. (2009). Nanowire Non-Volatile Memory with HfO2 Trapping Layers 1st IEEE International Memory Workshop (IMW), sponsored by IEEE Electron Devices Society.

Abdel-Fattah, T., Gu, D., Baumgart, H. and Namkoong, G. (2009). Optimizing the Release of ALD Grown ZnO Nanotubes from Anodic Aluminum Oxide Templates (pp. 191-198) ECS transactions.

Tapily, K., Stegall, D., Gu, D., Baumgart, H., Namkoong, G. and Elmustafa, A. (2009). Physical Characterization of Thin Films Zinc Oxide Grown by ALD (pp. 85-92) ECS transactions.

Tapily, K., Stegall, D., Gu, D., Baumgart, H., Namkoong, G. and Elmustafa, A. (2009). Physical Characterization of Zinc Oxide Thin Films Grown by ALD (pp. 85) ECS Trans. .

Valente-Feliciano, A., Phillips, H., Reece, C., Zhao, X., Gu, D., Baumgart, H., Lukaszew, R., Xiao, B. and Seo, K. (2009). RF and Structural Characterization of SRF Films (pp. 431) Berlin: Proceedings of 14th International Conference on RF Superconductivity (SRF 2009).

Foe, K., Boland, P., Namkoong, G., Gu, D., Baumgart, H. and Abdel-Fattah, T. (2009). Self-organized Crystal Growth of Nanostructured ZnO Morphologies by Hydrothermal Synthesis (pp. 3) ECS Transactions.

Zhu, X., Gu, D., Li, Q., Loannou, D., Baumgart, H., Suehle, J. and Richter, C. (2009). Silicon Nanowire Non-Volatile Memory with High-k Gate Dielectric Stack 16th Conference of Insulating Films on Semiconductors INFOS, Journal Microelectronics Engineering.

Wu, A., Gu, D. and Baumgart, H. (2009). TEM Study of Niobium Surfaces Treated by Different Polishing Techniques (pp. 300) Berlin: Proceedings of 14th International Conference on RF Superconductivity (SRF 2009).

Tapily, K., Jakes, J., Stone, D., Shrestha, P., Gu, D., Baumgart, H. and Elmustafa, A. (2008). Comparison of Nanomechanical Behavior of the Amorphous and Crystalline Phases of ALD HfO2 (pp. 269) ECS Transactions.

Tapily, K., Baumgart, H., Gu, D., Elmustafa, A., Krause, M. and Petzold, M. (2008). Effect of Wafer Bonding and Layer Splitting on Nanomechanical Properties of standard and strained SOI Films (pp. 337) ECS Transactions.

Shrestha, P., Tapily, K., Gu, D. and Baumgart, H. (2008). Electrical Properties of high-k ALD HfO2 deposited on strained Si Layers Epitaxially Grown on Si0.8Ge0.2/ Si Substrates (pp. 159) ECS Transactions.

Gu, D., Baumgart, H., Zhu, M. and Celler, G. (2008). Strain Relaxation in Patterned Strained Silicon-on-Insulator (sSOI) by Raman Spectroscopy (pp. 329) ECS Transactions.

Gu, D., Baumgart, H., Bourdelle, K., Celler, G. and Elmustafa, A. (2008). Weakening of Hardness and Modulus of the Si Lattice by Hydrogen Implantation for Layer Transfer in Wafer Bonding Technology (pp. 385) ECS Transactions.

Merchant, S., Arnold, E., Baumgart, H., Egloff, R., Letavic, T., Mukherjee, S. and Pein, H. (1993). Dependence of Breakdown Voltage on Drift Length and Buried Oxide Thickness in SOI RESURF LDMOS Transistors (pp. 144-128) 5th Int. Symp. on Power Semiconductor Devices & ICs, IEEE Electron Devices Society.

Baumgart, H., Egloff, R., Arnold, E., Letavic, T., Merchant, S., Mukherjee, S. and Bhimnatwala, H. (1993). Measurement of Minority Carrier Diffusion Length and Lifetime in SOI Devices by Flying Spot Laser Scanner as a Function of Residual Misfit (pp. 44) Palm Springs, CA: IEEE International SOI Conference.

Baumgart, H., Steigmeier, E., Auderset, H., Abe, T., Letavic, T., Pinker, R. and Arnold, E. (1992). Light Scattering Topography Characterization of Bonded SOI Wafers (pp. 375-385) ECS Proceedings, The Electrochemical Society.

Pein, H., Arnold, E., Baumgart, H., Egloff, R., Letavic, T., Merchant, S. and Mukherjee, S. (1992). SOI High Voltage LDMOS and LIGBT Transistors with a Buried Diode and Surface P-Layer Ponte Vedra Beach, FL: IEEE International SOI Conference.

Letavic, T., Baumgart, H., Pinker, R., Merchant, S. and Arnold, E. (1992). Thermomechanical Device Processing Issues in Bonded SOI Wafers (pp. 397-413) ECS Proc. The Electrochemical Society.

Merchant, S., Arnold, E., Baumgart, H., Mukherjee, S., Pein, H. and Pinker, R. (1991). High Breakdown-Voltage Devices in Ultra-Thin SOI (pp. 150) Vail Valley, CO: IEEE International SOI Conference.

Merchant, S., Arnold, E., Baumgart, H., Mukherjee, S., Pein, H. and Pinker, R. (1991). Realization of High Breakdown Voltage ( > 700 V ) in Thin SOI Devices (pp. 31) 3rd Intl. Symp. on Power Semiconductor Devices & ICs, IEEE Electron Devices Society.

Baumgart, H., Pinker, R., Kellawon, P., Steigmeier, E. and de Kock, A. R.. (1990). Origin of Residual Defects in Bonding and Etch-Back Silicon-on-Insulator Technology (pp. 236) ECS Proceedings, The Electrochemical Society.

Baumgart, H., Pinker, R., Steigmeier, E., Auderset, H. and de Kock, A. R.. (1989). Impact of Interface Preparation on Defect Generation During Wafer Bonding (pp. 95) Stateline, Nevada: SOS/SOI Technology Conference.

Weber, J., Baumgart, H., Petruzzello, J. and Celler, G. (1988). Photoluminescence Characterization of Thin SOI Films Produced by Oxygen Implantation (pp. 117) Mat. Res. Soc. Symp. Proc.

Ramesh, S., Martinez, A., Petruzzello, J., Baumgart, H. and Arnold, E. (1986). Addressing the Problems of Agglomeration, Surface Roughness and Crystal Imperfection in SOI Films (pp. 45) Semiconductor-on-Insulator and Thin Film Transistor Technology, Materials Res. Soc. Symp. Proc.

Arnold, E., Landmann, U., Ramesh, S., Luedtke, W., Barnett, R., Cleveland, C., Martinez, A., Baumgart, H. and Khan, B. (1986). Formation of Facets at the Solid-Melt Interface in Silicon (pp. 21) Semiconductor-on-Insulator and Thin Film Transistor Technology, Mat. Res. Soc. Symp. Proc.

Baumgart, H. (1986). Physical Properties of Silicon-on-Insulator Films Grown by Unseeded Laser-Induced Zone-Melting (pp. 98) Boston: 169th Electrochemical Society Spring Meeting.

Baumgart, H. (1986). Silicon-on-Insulator Technology by Crystallization on Quartz Substrates (pp. 211) Advanced Processing and Characterization of Semiconductors III, Proc. of The Intl. Society of Optical Engineering, SPIE.

Baumgart, H., Phillipp, F., Ramesh, S., Khan, B., Martinez, A. and Arnold, E. (1986). Twin Stabilized Planar Growth of SOI Films (pp. 65) Semiconductor-on-Insulator and Thin Film Transistor Technology, Mat. Res. Soc. Symp. Proc.

Baumgart, H. and Phillipp, F. (1985). High Voltage Electron Microscopy Investigation of Subgrain Boundaries in Recrystallized Silicon-on-Insulator Structures (pp. 593) Energy Beam Solid Interactions and Transient Thermal Processing, Mat. Res. Soc. Symp. Proc.

Baumgart, H. and Phillipp, F. (1985). Low Angle Grain Boundaries in Zone-Melting Grown Silicon (pp. 89) Royal Microscopical Society Conference on Microscopy of Semiconducting Materials, Institute of Physics Conf.

Baumgart, H., Frye, R., Phillipp, F. and Leamy, H. (1984). Dielectric Isolation Using Porous Silicon (pp. 63) Comparison of Thin Film Transistor and SOI Technologies, Mat. Res. Soc. Symp. Proc.

Baumgart, H., Arnold, E., Petruzzello, J., McGee, T. and Frommer, M. (1984). Structural Properties of Dielectric Layers Following CO2 Laser Irradiation of SOI Structure (pp. 87) Comparison of Thin Film Transistors and SOI Technologies, Mat. Res. Soc. Symp. Proc.

Baumgart, H., Celler, G., Lischner, D., McRobinson and Sheng, T. (1983). Defect Control During Epitaxial Regrowth by Rapid Thermal Annealing (pp. 349) Elsevier North Holland: Laser Solid Interactions and Transient Thermal Processing of Materials, Mat. Res. Soc. Symp. Proc.

Baumgart, H., Phillipp, F. and Celler, G. (1983). Defect Structure of Epitaxial Films Grown on Porous Silicon (pp. 223) Microscopy of Semiconducting Materials, Inst. of Physics Conf.

Baumgart, H., Phillipp, F. and Leamy, H. (1982). Defect Formation in CO2 Laser Annealed Silicon (pp. 355) Elsevier North Holland: Laser Electron-Beam Interactions with Solids, Mat. Res. Soc. Symp. Proc.

Baumgart, H., Leamy, H., Trimble, L., Doherty, C. and Celler, G. (1982). Diffusion of Arsenic and Phosphorus in Laser Processed Polycrystalline Silicon Thin Films (pp. 311) Elsevier North Holland: Grain Boundaries in Semiconductors, Mat. Res. Soc. Symp. Proc.

Baumgart, H., Frye, R., Trimble, L., Leamy, H. and Celler, G. (1982). Laser Processing of Porous Silicon (pp. 609) Elsevier North Holland: Laser and Electron-Beam Interactions with Solids, Mat. Res. Soc. Symp. Proc.

Merkle, K., Uebbing, R., Baumgart, H. and Phillipp, F. (1982). Picosecond Laser Pulse Induced Damage in Crystalline Silicon (pp. 337) Elsevier North Holland: Laser and Electron-Beam Interactions with Solids, Mat. Res. Soc. Symp. Proc.

Trimble, L., Ng, K., Celler, G., Baumgart, H. and Leamy, H. (1982). Seeded Growth of Silicon over SiO2 Substrates by Seeded CW Laser Irradiation (pp. 505) Elsevier North Holland: Laser and Electron-Beam Interactions with Solids, Mat. Res. Soc. Symp. Proc.

Rozgonyi, G., Baumgart, H., Phillipp, F., Uebbing, R. and Oppolzer, H. (1982). Structural Modifications of Amorphized Silicon Surfaces following Picosecond Laser Irradiation (pp. 177) Elsevier North Holland: Laser and Electron-Beam Interactions with Solids, Mat. Res. Soc. Symp. Proc.

Baumgart, H., Hildebrand, O., Phillipp, F. and Rozgonyi, G. (1981). Correlation between EBIC Contrast and Residual Defects in Slip-Free CW Laser Annealed Silicon (pp. 127) Microscopy of Semiconducting Materials, Institute of Physics Conf. Series.

Rozgonyi, G., Baumgart, H. and Phillipp, F. (1981). Dislocation Nucleation, Growth and Suppression during CW Laser Annealing of Silicon (pp. 193) Elsevier North Holland: Laser and Electron-Beam Solid Interactions and Materials Processing, Mat. Res. Soc. Symp. Proc.

Rozgonyi, G., Baumgart, H., Phillipp, F., Uebbing, R. and Oppolzer, H. (1981). Picosecond Laser Annealing of Silicon (pp. 85) Institute of Physics Conference Series.

Baumgart, H., Phillipp, F., Uebbing, R. and Rozgonyi, G. (1980). Rapid Quenching of Defects and Crystal Regrowth During Millisecond and Picosecond Laser Annealing of Silicon (pp. Chap. 10 p. 509) Oiso: 11th Intl. Conf. on Defects and Radiation Effects in Semiconductors, Institute of Physics Conf.

Presentations

Baumgart, H. (March 5, 2011). Nanotechnology Engineering utilizing Template Replication Global Center of Excellence for Mechanical Systems Innovation (GMSI) of the University of Tokyo Tokyo, Japan.

Gu, D., Baumgart, H., Abdel-Fattah, T. and Namkoong, G. ( 2010). Sacrificial Spacer Technology for Free-Standing Multiple Nested ALD Nanotubes 10th International Conference on Atomic Layer Deposition (ALD- 2010) Seoul, Korea.

Baumgart, H. ( 2010). Microfluidic Applications Utilizing Atomic Layer Deposition Nanotechnology Baltic ALD 2010 Conference Hamburg, Germany.

Valente-Feliciano, A., Phillips, H., Reece, C., Spradlin, J., Zhao, X., Gu, D., Baumgart, H., Beringer, D., Lukaszew, R., Xiao, B. and Seo, K. ( 2010). RF and Structural Characterization of SRF thin Films First International Particle Accelerator Conference IPAC-2010 Kyoto, Japan.

Tapily, K., Raj, A., Rozgonyi, G., Gu, D. and Baumgart, H. ( 2010). Hall Effect, DLTS and C-V Characterization of ALD HfO2 and ZnO Thin Films Meet. Abstr.– Electrochem. Soc. 1002, 1552 (2010), the 8th International Symposium on High Dielectric Constant and other Dielectric Materials for Nanoelectronics and Photonics Las Vegas, NV.

Tapily, K., Moutanabbir, O., Gu, D., Baumgart, H. and Elmustafa, A. ( 2010). Thermal Behavior of the Mechanical Properties of GaN throughout Hydrogen-Induced Thin Film Layer Transfer Meet. Abstr.– Electrochem. Soc. 1002, 1711 (2010), the 8th International Symposium on High Dielectric Constant and other Dielectric Materials for Nanoelectronics and Photonics Las Vegas, NV.

Foe, K., Boland, P., Gu, D., Baumgart, H., Abdel-Fattah, T., Jeong, J. and Namkoong, G. ( 2010). Controlled Synthesis of ZnO Nanospheres using Hydrothermal Process Meet. Abstr.–Electrochem. Soc. 1002, 102 (2010), Symposium A-1 General Topic Session Las Vegas, NV.

Gu, D., Yalcin, S., Baumgart, H., Qian, S., Baysal, O. and Beskok, A. ( 2010). Electrophoretic Light Scattering for Surface Zeta Potential Measurement of ALD Metal Oxide Films Meet. Abstr.–Electrochem. Soc. 1002, 1403 (2010), the 6th International Symposium on Atomic Layer Deposition Applications Las Vegas, NV.

Shrestah, P., Gu, D., Tran, N., Tapily, K., Baumgart, H. and Namkoong, G. ( 2010). Investigation of Volmer-Weber Growth during the Nucleation Phase of ALD Platinum Thin Films and Template based Platinum Nanotubes Meet. Abstr.–Electrochem. Soc. 1002, 1425 (2010), the 6th International Symposium on Atomic Layer Deposition Applications Las Vegas, NV.

Tapily, K., Gu, D., Baumgart, H., Rigo, M. and Seo, J. ( 2010). Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition Meet. Abstr.–Electrochem. Soc. 1002, 1442 (2010), the 6th International Symposium on Atomic Layer Deposition Applications Las Vegas, NV.

Tapily, K., Gu, D. and Baumgart, H. ( 2010). Frank van der Merwe Growth Mechanism of ALD ZnO studied by X-ray Diffraction Meet. Abstr.–Electrochem. Soc. 1002, 1443 (2010), the 6th International Symposium on Atomic Layer Deposition Applications Las Vegas, NV.

Gu, D., Tapily, K., Baumgart, H. and Namkoong, G. ( 2010). Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures Meet. Abstr.–Electrochem. Soc. 1002, 1444 (2010), the 6th International Symposium on Atomic Layer Deposition Applications Las Vegas, NV.

Abdel-Fattah, T., Tapily, K., Gu, D. and Baumgart, H. ( 2010). Gold Functionalized ALD Grown ZnO Nanotubes Meet. Abstr.–Electrochem. Soc. 1002, 1454 (2010), the International Symposium on Luminescence and Energy Efficiency Las Vegas, NV.

Li, Q., Zhu, X., Gu, D., Baumgart, H., Suehle, J. and Richter, C. ( 2010). Capacitance and Interface State Density of Metal/HfO2/SiNW Capacitor Arrays Meet. Abstr.–Electrochem. Soc. 1002, 1593 (2010), 4th International Symposium on Low-Dimensional Nanoscale Electronic and Photonic Devices Las Vegas, NV.

Boland, P., Foe, K., Gu, D., Baumgart, H., Lee, K. and Namkoong, G. ( 2010). Estimation of Organic Tandem Solar Cell Power Conversion Efficiency via Optical Simulation Methods Meet. Abstr.–Electrochem. Soc. 1002, 1667 (2010), the 6th International Symposium on Photovoltaics for the 21st Century Las Vegas, NV.

Gu, D., Baumgart, H., nauman, F. and Petzold, M. ( 2010). Finite Element Modeling and Raman Study of Strain Distribution in Patterned Device Islands on Strained Silicon-on-Insulator (sSOI) Substrates Meet. Abstr.–Electrochem. Soc. 1002, 1702 (2010), the 11th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications Las Vegas, NV.

Tapily, K., Moutanabbir, O., Abdullah, M., Gu, D., Baumgart, H. and Elmustafa, A. ( 2010). Hydrogen Ion-Induced AlN Thin Layer Transfer: An Elastomechanical Study Meet. Abstr.–Electrochem. Soc. 1002, 1754 (2010), the 11th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications Las Vegas, NV.

Tapily, K., Gu, D., Baumgart, H. and Hunt, C. ( 2010). Y2O3 Red Phosphors for General Lighting Coated by Atomic Layer Deposition (ALD) of ZnO for Enhanced Efficacy, Lifetime, and Thermal Stability Meet. Abstr.–Electrochem. Soc. 1002, 2310 (2010), the International Symposium on Luminescence and Energy Efficiency Las Vegas, NV.

Baumgart, H. (September , 2010). Microfluidic Applications Utilizing Atomic Layer Deposition Nanotechnology Baltic ALD 2010 Conference Hamburg, Germany.

Baumgart, H. (September , 2010). Atomic Layer Deposition for Nanotechnology Applications Christian Albrecht University of Kiel, Institute of Materials Science, Nanoporous Materials Kiel, Germany.

Baumgart, H. (September , 2010). Microfluidic Applications Utilizing Atomic Layer Deposition Nanotechnology Fraunhofer Institute of Materials Science Halle, Germany.

Baumgart, H. (September , 2010). Microfluidic Applications Utilizing Atomic Layer Deposition Nanotechnology University of Konstanz, Institute of Experimental Physics, Photovoltaic Lab Konstanz, Germany.

Gu, D., Xiao, B., Baumgart, H., Namkoong, G. and Crooks, R. (June , 2010). Atomic Layer Deposition of NbN Thin Films for Superconducting Radiofrequency (SRF) Cavities 10th international conference on Atomic Layer Deposition Seoul.

Gu, D., Tran, N., Tapily, K., Shrestha, P., Baumgart, H. and Namkoong, G. (June , 2010). Investigation of the Nucleation of ALD Platinum Films 10th international conference on Atomic Layer Deposition Seoul.

Gu, D., Baumgart, H., Abdel-Fattah, T. and Namkoong, G. (June , 2010). Sacrificial Spacer Technology for Free-Standing Multiple Nested ALD Nanotubes 10th international conference on Atomic Layer Deposition Seoul.

Baumgart, H. (May 27, 2010). Atomic Layer Deposition of Platinum thin Films and Template Based ALD Platinum Nanotubes Micron Technology Inc. Manassas, Virginia.

Shrestha, P., Gu, D., Baumgart, H., Namkoong, G. and Abdel-Fattah, T. (April , 2010). ALD Synthesis of Nested Coaxial Multiple Walled Nanotubes by Template Replication American Vacuum Society Mid Atlantic Chapter Meeting Newport News, VA.

Tapily, K., Tran, N., Gu, D. and Baumgart, H. (April , 2010). Atomic Layer Deposition (ALD) of Platinum Thin Films and Template based Pt Nanotubes American Vacuum Society Mid Atlantic Chapter Meeting Newport News, VA.

Baumgart, H. (February 4, 2010). Atomic Layer Deposition (ALD) of high-k Dielectric Films for Si Nanowire Nonvolatile Memory Devices and for Microfluidic Applications Physics Colloquium Hampton, VA.

Baumgart, H. (January 20, 2010). Understanding Strain and Strain Relaxation during Layer Transfer and Patterning in Wafer Bonding 2nd International IEEE Workshop on Low Temperature Bonding for 3-D Integration; IEEE Components, Packaging & Manufacturing Technology Conference Tokyo, Japan.

Baumgart, H. (January 20, 2010). Understanding Strain and Strain Relaxation during Layer Transfer and Patterning in Wafer Bonding 2nd International IEEE Workshop on Low Temperature Bonding for 3-D Integration; IEEE Components, Packaging & Manufacturing Technology Conference University of Tokyo, Hongo, Tokyo, Japan.

Baumgart, H. (January 18, 2010). Atomic Layer Deposition for Nanotechnology Fabrication with Applications in Microelectronics, Biosensors and Microfluidics Global Center of Excellence for Mechanical Systems Innovation (GMSI) Tokyo, Japan.

Baumgart, H. (January 18, 2010). Atomic Layer Deposition for Nanotechnology Fabrication with Applications in Microelectronics, Biosensors and Microfluidics Global Center of Excellence for Mechanical Systems Innovation (GMSI) of the University of Tokyo Tokyo, Japan.

Gu, D., Naumann, F., Petzold, M., Zhu, M. and Baumgart, H. (December , 2009). Investigation of Strain Relaxation in Patterned Strained Silicon-on-Insulator Structures by Raman Spectroscopy and Computer Simulation IEEE International Semiconductor Device Research Symposium (ISDRS 2009) College Park, Maryland.

Zhu, X., Li, Q., Ioannou, D., Gu, D., Baumgart, H., Bonevich, J., Suehle, J. and Richter, C. (December , 2009). Silicon Nanowire Nonvolatile-Memory with Varying HfO2 Charge Trapping Layer Thickness IEEE International Semiconductor Device Research Symposium (ISDRS 2009) College Park, MD.

Bajpai, R., Zaghloul, M., Gu, D., Baumgart, H. and Abdel-Fattah, T. (December , 2009). Synthesis and Assembly of ZnO Nanorods Grown by ALD for Biosensor Application IEEE International Semiconductor Device Research Symposium (ISDRS 2009) College Park, MD.

Gu, D., Tapily, K., Shrestha, P. and Baumgart, H. (December , 2009). Nanotube/Nanorods Fabrication of ZnO Using Atomic Layer Deposition and the Template Replication Method IEEE International Semiconductor Device Research Symposium (ISDRS 2009) College Park, Maryland.

Boland, p., Abdel-Fattah, T., Baumgart, H. and Namkoong, G. (December , 2009). Optimization of Active Layer Thickness in Planar Organic Solar Cells via Optical Simulation Methods the IEEE International Semiconductor Device Research Symposium (ISDRS 2009) College Park, Maryland.

Ndoye, C., Liu, T., Orlowski, M., Gu, D., Tran, N. and Baumgart, H. (December , 2009). Si Nanowire MOSFET with Gate-All-Around Electrode the IEEE International Semiconductor Device Research Symposium (ISDRS 2009) College Park, Maryland.

Zhu, X., Gu, D., Li, Q., Ioannou, D., Baumgart, H., Suehle, J. and Richter, C. ( 2009). Silicon Nanowire Non Volatile Memory with High-k Gate Dielectric Stack Insulating Films on Semiconductors, INFOS 2009 Cambridge, UK .

Baumgart, H. (November 24, 2009). Atomic Layer Deposition (ALD) for Gate Stack Engineering and for Microfluidics and Sensor Applications Materials Science and Engineering Department North Carolina State University, Raleigh, North Carolina.

Gu, D., Shrestha, P., Baumgart, H., Abdel-Fattah, T. and Namkoong, G. (October , 2009). ALD Synthesis of Tube-in-Tube Nanostructures of Transition Metal Oxides by Template Replication Meet. Abstr. – Electrochem. Soc. 902, 2027 (2009), the 5th International Symposium on Atomic Layer Deposition Applications Vienna, Austria.

Foe, K., Boland, P., Namkoong, G., Gu, D., Baumgart, H. and Abdel-Fattah, T. (October , 2009). Self-organized Crystal Growth of Nanostructured ZnO Morphologies by Hydrothermal Synthesis Meet. Abstr. –Electrochem. Soc. 902, 122 (2009), Electrochemical Society Meeting Vienna, Austria.

Abdel-Fattah, T., Gu, D., Baumgart, H. and Namkoong, G. (October , 2009). Optimizing the Release of ALD Transition Metal Oxide Nanotubes from Anodic Aluminum Oxide Templates Meet. Abstr. –Electrochem. Soc. 902, 2046 (2009), 5th International Symposium on Atomic Layer Deposition Applications Vienna, Austria.

Yu, L., Rozgonyi, G., Shrestha, P., Gu, D. and Baumgart, H. (October , 2009). C-V and Deep Level Transient Spectroscopy (DLTS) of ALD HfO2 on s-Si/SiGe/Si: Effects of strained-Si Thickness and Surface Nitridation Meet. Abstr. –Electrochem. Soc. 902, 2144 (2009), High Dielectric Constant Materials and Gate Stacks 7 Symposium Vienna, Austria.

Zhu, X., Gu, D., Li, Q., Baumgart, H., Ioannou, D., Suehle, J. and Richter, C. (October , 2009). Application of ALD high-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories Meet. Abstr. –Electrochem. Soc. 902, 2154 (2009), High Dielectric Constant Materials and Gate Stacks 7 Symposium Vienna, Austria.

Abdel-Fattah, T., Gu, D., Baumgart, H., Bajpai, R. and Zaghloul, M. (October , 2009). Modeling and Characterization of ALD grown ZnO Nanotubes and their Integration into Sub-Micron MEMS Devices Meet. Abstr.–Electrochem. Soc. 902, 2019 (2009), the 5th International Symposium on Atomic Layer Deposition Applications Vienna, Austria.

Tapily, K., Gu, D., Baumgart, H., Namkoong, G. and Elmustafa, A. (October , 2009). Meet. Abstr.–Electrochem. Soc. 902, 2018 (2009), the 5th International Symposium on Atomic Layer Deposition Applications Physical Characterization of Zinc Oxide Thin Films Grown by ALD Vienna, Austria.

Baumgart, H. (October 1, 2009). Atomic Layer Deposition (ALD) of high-k Dielectric Films for Gate Stack Engineering and for Microfluidic Applications Swiss Federal Institute of Technology Zurich, Switzerland.

Valente-Feliciano, A., Phillips, H., Reece, C., Zhaoe, X., Gu, D., Baumgart, H., Lukaszew, R., Xiao, B. and Seo, K. (September , 2009). RF and Structural Characterization of SRF Films 14th International Conference on RF Superconductivity (SRF 2009) Berlin, Germany.

Wu, A., Gu, D. and Baumgart, H. (September , 2009). TEM Study of Niobium Surfaces Treated by Different Polishing Techniques 14th International Conference on RF Superconductivity (SRF 2009) Berlin, Germany.

Baumgart, H. (August 21, 2009). Synthesis of Nested Coaxial Nanotubes by ALD for Microfluidics and Sensor Applications Center for Nanoscale Science & Technology of the National Institute of Standards and Technology (NIST) of the United States Department of Commerce Gaithersburg, Maryland.

Gu, D., Yalcin, S., Baumgart, H., Qian, S., Baysal, O. and Beskok, A. (July , 2009). Zeta Potentials of ALD Metal Oxide Films for Microfluidic Applications American Vacuum Society (AVS) 9th International Conference on Atomic Layer Deposition ( ALD 2009) Monterey, California.

Tapily, K., Stegall, D., Gu, D., Baumgart, H., Namkoong, G. and Elmustafa, A. (July , 2009). Structural and Nanomechanical Characterization of ALD ZnO American Vacuum Society (AVS) 9th International Conference on Atomic Layer Deposition (ALD 2009) Monterey, California.

Baumgart, H. (July 8, 2009). Fabrication of Si Nanowire Nonvolatile Memory Cells and Nanotemplate based Electroosmotic Pumps by Atomic Layer Deposition (ALD) Invited Summer Colloquium Darmstadt, Germany.

Baumgart, H. (July 6, 2009). Applications of Atomic Layer Deposition (ALD) in Nanotechnology Max-Planck Institute of Metals and Solid State Research Stuttgart, Germany.

Gu, D., Zhu, M., Naumann, F., Petzold, M. and Baumgart, H. (June , 2009). Experimental Raman Study and Finite Element Modeling of Strain Distribution in Patterned Device Islands on Strained Silicon-on-Insulator (sSOI) Substrates 51st Electronic Materials Conference (EMC), TMS University Park, Pennsylvania.

Gu, D., Zhu, M., Nauman, F., Petzold, M. and Baumgart, H. (June , 2009). Experimental Raman Study and Finite Element Modeling of Strain Distribution in 51st Electronic Materials Conference, TMS University Park, PA.

Gu, D., Tapily, K., Yao Yao, Shrestha, P. and Baumgart, H. (June , 2009). Low Temperature ZnO Growth for Nanotube Fabrication by Atomic Layer Deposition 51st Electronic Materials Conference, TMS University Park, PA.

Zhu, X., Gu, D., Li, Q., Loannou, D., Baumgart, H., Suehle, J. and Richter, C. (June 29, 2009). Silicon Nanowire Non-Volatile Memory with High-k Gate Dielectric Stack 16th Conference of Insulating Films on Semiconductors INFOS Cambridge, UK.

Zhua, X., Gu, D., Lia, Q., Loannou, D. E.., Baumgart, H., Suehle, J. S.. and Richter, C. A.. (May , 2009). Nanowire Non-Volatile Memory with HfO2 Trapping Layers 1st IEEE International Memory Workshop (IMW), sponsored by IEEE Electron Devices Society Monterey, California.

Baumgart, H. (May 18, 2009). Thin Film, Nanotechnology and Sensor Development at �鶹��ý’s Applied Research Center at Jefferson National Accelerator Facility Invited Science Seminar Manassas, Virginia.

Tapily, K. and Baumgart, H. (April , 2009). Characterization of ALD grown ZnO American Vacuum Society Mid Atlantic Chapter Meeting Newport News, VA.

Shrestha, P., Ndoye, C., Anderson, W., Elliott, D., Thomas, J., Baumgart, H. and Gu, D. (April , 2009). Electrical Properties of MOS Capacitors with High-k Dielectric HfO2 Gate Insulator Using ALD American Vacuum Society Mid Atlantic Chapter Meeting Newport News, VA.

Tapily, K., Baumgart, H., Gu, D., Elmustafa, A., Krause, M. and Petzold, M. (October , 2008). Effect of Wafer Bonding and Layer Splitting on Nanomechanical Properties of standard and strained SOI Films 10th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, The Electrochemical Society Fall Meeting Honolulu, Hawaii.

Gu, D., Baumgart, H., Zhu, M. and Celler, G. (October , 2008). Strain Relaxation in Patterned Strained Silicon-on-Insulator (sSOI) by Raman Spectroscopy 10th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, The Electrochemical Society Fall Meeting Honolulu, Hawaii.

Gu, D., Baumgart, H., Bourdelle, K., Celler, G. and Elmustafa, A. (October , 2008). Weakening of Hardness and Modulus of the Si Lattice by Hydrogen Implantation for Layer Transfer in Wafer Bonding Technology 10th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, The Electrochemical Society Fall Meeting Honolulu, Hawaii.

Tapily, K., Jakes, J., Stone, D., Shrestha, P., Gu, D., Baumgart, H. and Elmustafa, A. (October , 2008). Comparison of Nanomechanical Behavior of the Amorphous and Crystalline Phases of ALD HfO2 4th International Symposium on Atomic Layer Deposition Applications, The Electrochemical Society Fall Meeting Honolulu, Hawaii.

Shrestha, P., Tapily, K., Gu, D. and Baumgart, H. (October , 2008). Electrical Properties of high-k ALD HfO2 deposited on strained Si Layers Epitaxially Grown on Si0.8Ge0.2/ Si Substrates 4th International Symposium on Atomic Layer Deposition Applications, The Electrochemical Society Fall Meeting Honolulu, Hawaii.

Abdel-Fattah, T., Gu, D., Baumgart, H. and Namkoong, G. (October , 2008). Synthesis of Zirconia and Hafnia Tubes by Atomic Layer Deposition (ALD) Template Method 4th International Symposium on Atomic Layer Deposition Applications, The Electrochemical Society Fall Meeting Honolulu, Hawaii.

Thitsa, M., Baumgart, H., Gu, D. and Albin, S. (October , 2008). Enhanced Photonic Band Gap and Defect Structure of Diamond Based Photonic Crystals using ALD Hafnium Oxide Coating Meet. Abstr. – Electrochem. Soc. 802, 1905 (2008), published at the 4th International Symposium on Atomic Layer Deposition Applications, 214th Electrochemical Society Meeting Honolulu, Hawaii.

Baumgart, H. (July 22, 2008). Review of Atomic Layer Deposition (ALD) for Superconducting RF Applications 3rd International Workshop on Thin Films applied to Superconducting RF and new Ideas for pushing the Limits of RF Superconductivity, Thomas Jefferson Labs Newport News, Virginia.

Baumgart, H. (June 26, 2008). Application of Atomic Layer Deposition for Gate Stack Engineering on strained Silicon-on-Insulator (sSOI) and Germanium-on-Insulator (GeOI) Technology Platform for future High Performance CMOS Devices Micron Technology R&D management Charlottesville, VA.

Baumgart, H. (November , 2007). Strain Engineered Silicon-on-Insulator (sSOI) Technology by Wafer Bonding and Layer Transfer 1st International IEEE Workshop on Low Temperature Bonding for 3-D Integration; IEEE Components, Packaging & Manufacturing Technology Conference University of Tokyo, Hongo, Tokyo, Japan.

Baumgart, H. (November , 2007). Strain Engineered Silicon-on-Insulator (sSOI) Technology by Wafer Bonding and Layer Transfer 1st International IEEE Workshop on Low Temperature Bonding for 3-D Integration; IEEE Components, Packaging & Manufacturing Technology Conference University of Tokyo, Hongo, Tokyo, Japan.

Gu, D., Tapily, K., Shrestha, P., Celler, G. and Baumgart, H. (October , 2007). Experimental Study of Atomic Layer Deposition (ALD) HfO2 Deposited on Strained Silicon-on-Insulator (sSOI) & extra strained (xsSOI) and SOI 3rd International Symposium on Atomic Layer Deposition Applications, Electrochemical Society Fall Meeting Washington D.C..

Thitsa, M., Gu, D., Baumgart, H. and Albin, S. (October , 2007). Tuning the absolute Bandgap of Silicon Photonic Crystals by Atomic Layer Deposition (ALD) Interfacial Layers 3rd International Symposium on Atomic Layer Deposition Applications, Electrochemical Society Fall Meeting Washington D.C..

Tapily, K., Jakes, J., Stone, D., Shrestha, P., Gu, D., Baumgart, H. and Elmustafa, A. (October , 2007). Nanomechanical Properties of High-k Dielectrics Grown by Atomic Layer Deposition 3rd International Symposium on Atomic Layer Deposition Applications,, Electrochemical Society Fall Meeting Washington D.C..

Jakes, J., Stone, D., Tapily, K., Baumgart, H., Celler, G. and Elmustafa, A. (October , 2007). Nanoindentation Study of Silicon-on-Insulator (SOI) and Strained (sSOI) Multilayer Composite Films American Vacuum Society 54th International Symposium & Exhibition Seattle, Washington.

Miller, N., Tapily, K., Baumgart, H., Elmustafa, A., Celler, G. and Brunier, F. (April , 2007). Nanomechanical Properties of Strained Silicon-on-Insulator (sSOI) Films Epitaxially grown on Si1-xGex and Layer Transferred by Wafer Bonding Symposium HH:. Surface and Interfacial Nanomechanics, Materials Research Society Spring Meeting San Francisco, California.

Baumgart, H. (July 12, 2006). Thin Film Materials Challenges in Nanoelectronic Technology 6th Fraunhofer Colloquium, Fraunhofer Institute – Center for Nanoelectronic Technologies CNT Dresden, Germany.

Baumgart, H. (July 12, 2006). Thin Film Materials Challenges in Nanoelectronic Technology 6th Fraunhofer Colloquium, Fraunhofer Institute – Center for Nanoelectronic Technologies CNT Dresden, Germany.

Baumgart, H. (March , 2005). Technology Development TechXpress and TDRAM for Leading Edge CMOS Characterization First Silicon Malaysia Sdn. Bhd Sarawak, Malaysia.

Baumgart, H. (February , 2005). Introduction to TDROM, TDAnalog and TestChip Analysis for Random Failure Mode Detection and Yield Improvement Silterra Malaysia SDN. BHD., Kulim Hi-Tech Park Kedah, Malaysia.

Baumgart, H. (January 14, 2005). Challenges to BEOL Contact Integration and Yield Optimization for High Performance CMOS Logic Platform Development at the 90nm and 65nm Technology Nodes �鶹��ý Norfolk, Virginia.

Baumgart, H. (April 9, 2004). Process Control and Yield Enhancement for BEOL and Contact Module at 130nm and 90nm Technology Node National Semiconductor Portland, Maine.

Baumgart, H. (March 22, 2004). Voltage Contrast Inspection in BEOL Yield Enhancement Module Integration for CMOS Logic Platform Development Mosel-Vitelic Corp San Jose, California.

Baumgart, H. (March 12, 2004). Contact Module Process Recovery Case Study for 130nm CMOS Logic with Copper Dual Damascene Backend University of California Davis Davis, California.

Baumgart, H. (January , 2004). Voltage Contrast Inspection in BEOL Yield Enhancement Module Integration for CMOS Logic Platform Development HPL Technologies ( Heuristic Physics Labs) Austin, Texas.

Baumgart, H. (October 7, 2003). Reduction of Yield Losses due to Cu Puddle Shorts by Conditioning the Surface of Low-K Infineon Technologies SC 300 Dresden, Germany.

Baumgart, H. (May , 2003). Containment of Systematic Yield Detractors of the BEOL Module of Motorola’s Flagship SOI Technology HiP7 HP SOI ST Microelectronics-Philips-Motorola 300mm Research Alliance Crolles 2 Grenoble - Crolles, France.

Singhal, A., Sparks, T., Strozewski, K., Huang, F., Parihar, S., Schmidt, J., Boeck, B., Fretwell, J., Yeap, G., Sheth, V., Veeraghavan, S., Melnick, B. and Baumgart, H. (April , 2003). A Novel Approach to Contact Integration at 90 nm and Beyond ULSI Process Integration III Symposium, Electrochemical Society Spring Meeting Paris, France.

Baumgart, H. (February , 1997). Device Physics and Technology of LDMOS Devices in SOI Technology Max-Planck Institute of Microstructure Physics Halle, Germany.

Baumgart, H. (February , 1997). High Voltage LDMOS Process Development in SOI Technology for Lighting Electronics Applications Siemens Munich, Germany.

Baumgart, H., Letavic, T., De Wolf, I., Tsou, L., Maes, H. and Egloff, R. (May , 1995). Analysis of Process-Induced Stresses in Lateral SOI Trench Isolation Structures for High Voltage Devices in Bonded SOI The Electrochemical Society Spring Meeting Reno, Nevada.

Egloff, R., Letavic, T., Merchant, S., Greenberg, B. and Baumgart, H. (May , 1995). Strain Sources in Bond and Etch-back Silicon-on-Insulator The Electrochemical Society Spring Meeting Reno, Nevada.

Baumgart, H. (October 14, 1994). A Novel High Voltage LDMOS Process in SOI Technology Siemens USA East Fishkill, New York.

Baumgart, H. (March 25, 1994). Advances in Silicon-on-Insulator ( SOI ) Technology Physics Seminar State University of New York Albany, New York.

Baumgart, H., Egloff, R., Arnold, E., Letavic, T., Merchant, S., Mukherjee, S. and Bhimnatwala, H. (October , 1993). Measurement of Minority Carrier Diffusion Length and Lifetime in SOI Devices by Flying Spot Laser Scanner as a Function of Residual Misfit 1993 IEEE International SOI Conference Palm Springs, California.

Pein, H., Arnold, E., Baumgart, H., Egloff, R., Letavic, T., Merchant, S. and Mukherjee, S. (October , 1992). SOI High Voltage LDMOS and LIGBT Transistors with a Buried Diode and Surface P-Layer 1992 IEEE International SOI Conference Ponte Vedra Beach, Florida.

Merchant, S., Arnold, E., Baumgart, H., Mukherjee, S., Pein, H. and Pinker, R. (October , 1991). High Breakdown Voltage Devices in Ultra-Thin SOI IEEE International SOI Conference Vail Valley, Colorado.

Letavic, T. and Baumgart, H. (May , 1991). Thermomechanical Device Processing Issues in Bonded SOI Wafers 1st Intl. Symposium on Semiconductor Wafer Bonding Science, Technology and Applications, The Electrochemical Society Spring Meeting Phoenix, Arizona.

Letavic, T. and Baumgart, H. (May , 1991). Thermomechanical Device Processing Issues in Bonded SOI Wafers 1st Intl. Symposium on Semiconductor Wafer Bonding Science, Technology and Applications, The Electrochemical Society Spring Meeting Phoenix, Arizona.

Baumgart, H. (October 31, 1990). Materials Issues in SIMOX Technology Duke University Materials Science Seminar Durham, North Carolina.

Baumgart, H., Pinker, R., Kellawon, P., Steigmeier, E. and de Kock, A. (May , 1990). Origin of Residual Defects in Bonding and Etch-Back Silicon-on-Insulator Technology 4th Intl. Symposium on Silicon-on-Insulator Technology and Devices, Electrochemical Society Spring Meeting Montreal, Canada.

Steigmeier, E., Auderset, H. and Baumgart, H. (April , 1990). Characterization of Silicon-on-Insulator ( SOI ) Materials by Light Scattering Topography 10th Conference of the Condensed Matter Division, European Physical Society Meeting Lisbon, Portugal.

Baumgart, H. ( 1989). Advances in Silicon-on-Insulator Thin Film Fabrication by High Dose Oxygen Implantation (SIMOX ) Philips Laboratories Briarcliff Manor, New York .

Baumgart, H., Pinker, R., Steigmeier, E., Auderset, H. and de Kock, A. (October , 1989). Impact of Interface Preparation of Defect Generation During Wafer Bonding IEEE SOS/ SOI Technology Conference Stateline, Nevada.

Theunissen, M., Goemans, A., de Kock, A., Geijselaers, M. and Baumgart, H. (October , 1989). Reassessment of Defect Models in Graphite Strip Heater Zone-Melt Recrystallized Material by Non-Destructive Thin Film Diagnostics IEEE SOS/ SOI Technology Conference Stateline, Nevada.

Baumgart, H. (October , 1989). X-ray Topographic Analysis for Monitoring of Growth Defects in Graphite Strip Heater Zone-Melt Recrystallized Silicon Films on Insulating Substrates Signetics Corporation Sunnyvale, California.

Baumgart, H. (June , 1989). X-ray Topographic Analysis of State-of-the-Art Zone-Melt Recrystallized Material Kopin Corporation Taunton, Massachusetts.

Baumgart, H. (May , 1989). Monitoring of Growth Defects in Graphite Strip Heater Zone-Melt Recrystallized Silicon Films Allied Signals Aerospace Technology Center Columbia, Maryland.

Krumme, J., Doorman, V., Hansen, P., Baumgart, H., Petruzzello, J. and Viegers, M. (April , 1989). Optical Recording Aspects of rf Magnetron Sputtered Iron Garnet Films Intl. Conference on Metallurgical Coatings San Diego, California.

Baumgart, H. and van Ommen, A. (October , 1988). Composition and Microstructure of Low Dislocation Content SIMOX IEEE SOS/ SOI Technology Workshop St. Simmons Island, Georgia.

Baumgart, H., Theunissen, M. and Geijselaers, M. (October , 1988). Defect Analysis of SOI Structures Made by CO2 Laser Zone-Melt Recrystallization SOS/ SOI Technology Workshop St. Simons Island.

Baumgart, H. (June , 1988). Current Status of the Technology of Silicon Separated by Implantation of Oxygen (SIMOX ) European Materials Research Society Meeting, Symposium C: “ Deep Implants: Fundamentals and Applications” Strasbourg, France.

Baumgart, H. (June , 1988). Current Status of the Technology of Silicon Separated by Implantation of Oxygen (SIMOX ) European Materials Research Society Meeting, Symposium C: “ Deep Implants: Fundamentals and Applications” Strasbourg, France.

Baumgart, H. (May , 1988). SIMOX Technology and Silicon Direct Wafer Bonding for SOI Applications Microelectronics Institute Stuttgart Stuttgart, Germany.

Baumgart, H. (April , 1988). Materials Advances in Silicon-on-Insulator ( SOI ) Technology by Laser-Induced Zone-Melting Recrystallization Siemens Central Research Laboratories Munich, Germany.

Baumgart, H. (April , 1988). Ion Beam Synthesis of Buried SiO2 Layers for Silicon-on-Insulator ( SOI ) Film Fabrication Wacker Chemitronic Laboratories Burghausen, Germany.

Theunissen, M., Haisma, J., Baumgart, H., Widdershoven, F. and Mulder, J. (March , 1988). Local Defect-Free Monocrystalline SOI Made by CO2 Laser Melting at Low Substrate 1 st European SOI Workshop: From Materials to Devices Meylan, France.

Baumgart, H., Wolters, D., van Duynhoven, A. and Petruzzello, J. (March , 1988). Influences of Very High Temperature Annealing of Physical and Dielectric Properties of Implanted Buried Oxide Layers 1st European SOI Workshop: From Materials to Devices Meylan, France.

Baumgart, H. (February , 1988). Physical Properties of Silicon-on-Insulator ( SOI ) Films Grown by Unseeded Laser Induced Zone-Melting Max Planck Institute of Solid State Research Stuttgart, Germany.

Arnold, E. and Baumgart, H. (October , 1987). Interfacial and Dielectric Properties of SIMOX and Zone-Melting Recrystallized SOI Buried Oxides 1987 SOS/ SOI Technology Workshop Durango, Colorado.

Baumgart, H. (September , 1987). Current Zone-Melt Recrystallization Research at Philips Labs in Briarcliff Manor Philips Central Research Laboratories Eindhoven, The Netherlands.

Olego, D. and Baumgart, H. (March , 1987). Raman Scattering Characterization of Semi-Insulating Polycrystalline Silicon 1987 American Physical Society Spring Meeting New York, City.

Baumgart, H., Weber, J., Pandya, R. and Marinez, A. (March , 1987). Structural and Photoluminescent Properties of Subboundaries in Zone-Melt Recrystallized Silicon-on-Insulator ( SOI ) Films 1987 American Physical Society Spring Meeting New York City.

Baumgart, H., Weber, J. and Pandya, R. (October , 1986). Radiative Recombination in Laser Zone-Melt Recrystallized SOI Films 1986 IEEE SOS/ SOI Technology Workshop Captiva Island, Florida.

Baumgart, H. (May , 1986). Physical Properties of Silicon-on-Insulator Films Grown by Unseeded Laser-Induced Zone-Melting 169th Meeting of The Electrochemical Society, Symposium on Silicon-on-Insulator Boston, Massachusetts.

Baumgart, H. (May , 1986). Physical Properties of Silicon-on-Insulator Films Grown by Unseeded Laser-Induced Zone-Melting 169th Meting of The Electrochemical Society, Symposium on Silicon-on-Insulator Boston, Massachusetts.

Landmann, U., Luedtke, W., Barnett, R., Cleveland, C., Arnold, E., Ramesh, S., Baumgart, H. and Martinez, A. (April , 1986). Faceting at the Silicon ( 100 ) Crystal Melt Interface 1986 American Physical Society Spring Meeting Las Vegas, Nevada.

Baumgart, H. (February , 1986). Defect Formation during Zone-Melting Recrystallization of Silicon-on-Insulator Films Philips Laboratories Briarcliff Manor, New York.

Baumgart, H. (January , 1986). Silicon-on-Insulator Technology by Crystallization on Quartz Substrates The Intl. Society for Optical Engineering (SPIE ), Symposium on Advanced Processing and Characterization of Semiconductors Los Angeles, California.

Baumgart, H. (January , 1986). Silicon-on-Insulator Technology by Crystallization on Quartz Substrates The Intl. Society for Optical Engineering (SPIE ), Symposium on Advanced Processing and Characterization of Semiconductors Los Angeles, California.

Baumgart, H., Phillipp, F., Martinez, A. and Arnold, E. (October , 1985). The Microstructure of Laser Processed Silicon-on-Insulator Films 1985 IEEE SOS/ SOI Technology Workshop Park City, Utah.

Baumgart, H., Phillipp, F., Martinez, A. and Arnold, E. (July , 1985). The Mechanism of Line Defect Nucleation in Zone-Melting Grown Silicon Films on SiO2 1985 Gordon Conference on Defects and Interfaces in Semiconductors Plymouth, New Hampshire.

Baumgart, H. (April , 1985). Silicon-on-Insulator Technology for Thin Film Transistors Philips Research Laboratories Hamburg, Germany.

Baumgart, H. (April , 1985). Silicon-on-Insulator Technology for Thin Film Transistors Technical University of Hamburg-Harburg Hamburg, Germany.

Baumgart, H. (March , 1985). Laser Recrystallized Silicon Films on Insulators for Large Area Devices Philips Research Laboratories Redhill, England.

Baumgart, H. (March , 1985). Laser Assisted Zone-Melt Recrystallization of Si Films on SiO2 Plessey Research Center Towcester, England.

Baumgart, H. (September , 1984). Silicon Thin Film Growth on Amorphous Substrates Centre National de Recherche Scientifique, Laboratoire de Physique des Solides Meudon ( Paris ), France.

Baumgart, H. (September , 1984). Subgrain Boundaries in Zone-Melting Processed Silicon Max Planck Institute of Solid State Research Stuttgart, Germany.

Baumgart, H. (September , 1984). Silicon-on-Insulator Technology by Laser Induced Zone-Melting Recrystallization Philips Central Research Laboratories Eindhoven, The Netherlands.

Baumgart, H. (February , 1984). Silicon-on-Insulator ( SOI ) Technology for Thin Film Transistors Signetics Corporation Sunnyvale, California.

Baumgart, H. (February , 1984). Full Isolation by Porous Oxidized Silicon Silicon-on-Insulator and Three Dimensional Integrated Circuits Workshop at the IEEE Intl. Solid State Circuits Conference San Francisco, California.

Baumgart, H. (January , 1984). Full Isolation by Porous Oxidized Silicon Silicon-on-Insulator and Three Dimensional Integrated Circuits Workshop at the IEEE Intl. Solid State Circuits Conference San Francisco, California.

Baumgart, H. (June , 1982). The Application of Laser Processing for Silicon Thin Film Growth on Insulators Brown Boveri Research Laboratories Baden, Switzerland.

Baumgart, H., Doherty, C. and Leamy, H. (June , 1982). Application of CO2 Laser Irradiation to the Fabrication of Silicon-on-Insulator Structures Electronic Materials Conference Fort Collins, Colorado.

Baumgart, H. (May , 1982). Laser Annealing Studies of Semiconductors INTEL Corporation Central Research Laboratories Santa Clara, California.

Baumgart, H. (May , 1982). New Dielectric Isolation Techniques using Porous Silicon North Carolina State University Raleigh, North Carolina.

Baumgart, H. (May , 1982). Laser Processing of Polycrystalline Thin Silicon Films Philips Laboratories Briarcliff Manor, New York.

Baumgart, H. (February , 1982). Zone-Melt Recrystallization Techniques for Silicon-on-Insulator Structures Hewlett Packard Laboratories Palo Alto, California.

Rozgonyi, G. and Baumgart, H. (May , 1981). Picosecond Laser Annealing of Silicon 4th Intl. Symposium on Silicon Material Science and Technology, The Electrochemical Society, Spring Meeting Minneapolis, Minnesota.

Baumgart, H. and Phillipp, F. (May , 1981). Correlation between EBIC Contrast and Residual Defects in Slip-Free CW Laser Annealed Silicon 4th Intl. Symposium on Silicon Material Science and Technology, The Electrochemical Society, Spring Meeting Minneapolis, Minnesota.

Baumgart, H. (March , 1981). Picosecond Laser Pulse Annealing Phenomena Spring Meeting of the German Physical Society Münster, Germany.

Baumgart, H. (December , 1980). SEM and EBIC Investigations of Residual Defects in Laser Annealed and Solid Phase Epitaxially Reconstructed Silicon Surfaces Centre National D’Etudes des Telecommunications Grenoble, France.

Phillipp, F., Baumgart, H., Rozgonyi, G., Gosele, U. and Packeiser, G. (October , 1980). HVEM Investigations of CW Laser Annealed Silicon Symposium for Electron Microscopy of Semiconductors, The Electrochemical Society, Fall Meeting Hollywood, Florida.

Baumgart, H. (October , 1980). X-ray Topographic Analysis of the Perfection of Laser Annealed Silicon Layers Symposium on X-ray Topography Berlin, W. Germany.

Baumgart, H. (September , 1980). Laser Induced Radiation Damage during CW Laser Annealing of Disordered Silicon Layers Hitachi Central Research Laboratories Tokyo, Japan.

Baumgart, H. (August , 1980). Application of X-ray Topography for Semiconductor Materials Analysis Semiconductor Institute of the Chinese Academy of Science Beijing, China.

Baumgart, H. (August , 1980). Current Laser Annealing Research at the Max Planck Institute of Solid State Research in Stuttgart Semiconductor Institute of the Chinese Academy of Science Beijing, China.

Baumgart, H. (April , 1980). Dislocation Generation during CW Laser Annealing of Silicon University of Catania, Catania Sicily, Italy.

Baumgart, H. and Rozgonyi, G. (March , 1980). Laser Annealing Investigation on the Time Dependence of the Nucleation of Slip Dislocations in Silicon Spring Meeting of the German Physical Society Freudenstadt, Germany.

• 2002: Motorola Award:, Motorola
• 2001: Infineon Technology: Special Recognition Award for Leadership of FMEA Team,
• 1989: Special Merit Award, Philips Research
• 1985: Special Merit Award, Philips Research
• 1984: President’s Making a Difference Award, Philips Research
• 1978: Graduate Research Scholarship, Max-Planck Society, Stuttgart, Germany
• 1975: Fulbright Scholarship, Purdue University, W. Lafayette, Indiana